SCD ozone scrub. use time warn. [Error Code:9072]

The count exceeded the set threshold value.

 

The risk of ozone entering the exhaust from the vacuum pump increases.

Replace the filling materials of the ozone scrubber and then reset the counter.

 

Press [HOME] > [Detector] > [Submenu] > [SCD Parts Counter],

and then display [SCD Parts Counter] screen and reset the counter.