Gas Chromatography
- DCG flow rate is not enough[Error Code:4213]
- SCD oxygen primary pressure is not enough[Error Code:6146]
- SCD hydrogen primary pressure is not enough[Error Code:6147]
- SCD WDT error[Error Code:6148]
- SCD heater relay has been fixed to ON[Error Code:6149]
- SCD flow controler#1 was not connected[Error Code:6151]
- SCD flow controler#2 was not connected[Error Code:6152]
- SCD PMT light was leaked[Error Code:6154]
- SCD furnace temperature is low[Error Code:6155]
- SCD ozonizer oxygen flow is low[Error Code:6156]
- SCD hydrogen control irregularity[Error Code:6163]
- SCD nitrogen control irregularity[Error Code:6167]
- The dual AOC version does not match with each other[Error Code:9081]
- Detected hydrogen leak[Error Code:51]